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RF Micro-Electro-Mechanical Systems and Devices

Thursday August 9, 2018

8:30 AM-5:00 PM (full day)


Nima Ghalichechian, Assistant professor. Resonators, silicon clock, ohmic switches, reconfigurable antennas and arrays, novel materials, and microfabrication processes

Abstract: The field of radio frequency micro-electro-mechanical systems (RF MEMS) is interdisciplinary and broad. Several RF MEMS devices will be discussed in this course. These include resonators, silicon clock, RF ohmic switches, switched capacitor banks, tunable filters, variable capacitors, phase shifters, packaging, phased arrays, reconfigurable RF systems, antenna tuning, optical antennas, micro/nano bolometers, integrated antennas. Among the topics discussed, are also MEMS fabrication and characterization techniques. Upon completion of the course, we hope the attendees acquire knowledge about 1) the field of MEMS, 2) fundamentals of microfabrication, 3) wide range of RF MEMS device operation principles and examples, and 4) current state-of the-art technology and challenges.