Course title: RF Micro-Electro-Mechanical Systems and Devices
Thursday August 4, 2016
Abstract: The field of micro-electro-mechanical systems (MEMS) is an interdisciplinary area that includes design, fabrication, and characterization of devices such as sensors and actuators that are (typically) capable of micron-size mechanical movements to achieve certain functionality. For more than a decade, commercial forms of these devices have been integrated into the technology that we use in our daily life. Microfabrication is a key building block of aforementioned microsystems and will be covered in this course with emphasize on processes that are unique to MEMS. Other aspects such as multi-physics design and simulation will be discussed. Classical examples and case studies for MEMS devices will be presented during the morning session. The afternoon session will solely concentrate on RF concepts and devices. During this lecture, we hope the attendees acquire better understanding of a) the field of MEMS, b) fundamentals of microfabrication, c) RF switches, reconfigurable antennas, and d) challenges in realization of millimeter-wave and terahertz systems.