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RF Microsystems Overview

RF MICROSYSTEMS

The research in our group is interdisciplinary and centers around two areas of micro/nanotechnology and electromagnetics. Our approach is to use novel microfabricaton techniques to develop small scale high frequency electromagnetic devices and systems. Specifically, we are focused on reconfigurable antennas and circuits, millimeter-wave (30-300 GHz) antennas, phased arrays, innovative beam steering techniques, terahertz (>300 GHz)  microsystems, sensors, novel materials, and microfabrication processes. Occasionally our research intersects with the microwave area (<30 GHz).

HOW DO WE PERFORM OUR RESEARCH?

Our research is mainly composed of the following three phases: 1) design and simulation, 2) micro fabrication, 3) test and measurement. We use the following tools to conduct our work in each phase

Design and Simulation

ANSYS HFSS
Agilent ADS
COMSOL Multiphysics
AutoCAD
L-Edit (provided by NTW)
SolidWorks
MATLAB

Microfabrication

Photolithography, thin film deposition, etching, microscopy…. at the Nanotech West Facility at the Ohio State University http://nanotech.osu.edu/
ElectroScience Lab https://electroscience.osu.edu/

Test and Measurement

ElectroScience Lab https://electroscience.osu.edu/